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ECLASS BASIC 13.0 (en)
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- 33 Installation (complete)
- 33-15 Surface technology (complete)
- 33-15-09 Plasma installation (diffusion and coating, complete)
- 33-15-09-90 Plasma installation (diffusion and coating, complete, unspecified)
- 33-15-09-91 Plasma installation (diffusion and coating, complete, parts)
- 33-15-09-92 Plasma installation (diffusion and coating, complete, accessories)
Classification: 33150900 [AKL114009]
Preferred name | 33-15-09 Plasma installation (diffusion and coating, complete) |
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IRDI | 0173-1#01-AKL114#009 |
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